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提出了一种结合白光扫描干涉术与图像分割技术的薄膜自动测量方法,可以同时得到薄膜的上下表面形貌以及厚度等几何参数。测试系统集成了Mirau干涉物镜,通过高精度纳米定位器带动物镜实现垂直扫描。当薄膜厚度足够时,扫描所得信号会含有两组可分离的干涉条纹,利用Otsu方法实现双峰信号的自动分离。标准膜厚的测量实验表明,本文方法可以以nm级分辨力对符合可测条件的薄膜几何参数进行有效提取。
An automatic thin film measurement method combined with white-light scanning interferometry and image segmentation technology is proposed. The geometrical parameters such as top and bottom surface topography and thickness of the film can be obtained simultaneously. The test system incorporates a Mirau interferometer objective that drives the objective through a high-precision nano-positioner for vertical scanning. When the thickness of the film is enough, the scanned signal will contain two sets of separable interference fringes, using the Otsu method to achieve automatic separation of bimodal signals. The measurement of the standard film thickness shows that the proposed method can effectively extract the geometrical parameters of the film which meet the measurable conditions with nm resolution.