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设计制作了一种由电热激励/压敏电桥拾振的二氧化硅/硅双层微桥谐振器及其闭环谐振电路实现的高Q值微机械压控振荡器.通过调节压敏电桥的桥压,改变桥的平均温升和轴向应变,可调节压控振荡器的中心频率.理论计算和实验结果表明,输出信号的频率与桥压的平方具有良好的线性关系.对所测试的器件,其线性度为0.16％,振荡频率可调节范围与振荡频率的比值为17.15％.
A high-Q micromechanical voltage-controlled oscillator with high Q value realized by a silicon dioxide / silicon double-layer micro-bridge resonator and its closed-loop resonant circuit is designed and fabricated by electrothermal excitation / varistor bridge. Of the bridge pressure to change the average temperature and axial strain of the bridge to adjust the center frequency of the VCO.The theoretical calculation and experimental results show that the output signal frequency and the square of the bridge pressure has a good linear relationship between the test Of the device, the linearity of 0.16%, the oscillation frequency adjustable range and oscillation frequency ratio of 17.15%.