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为使工程纳米技术成为一个实用学科,需要能在亚原子量级上进行定位与制造的机器.笔者已对它的结构、马达配电原理、干涉技术等细节进行了研究.用网格板时机器进行自标定,设计了一种光学显微镜来探测网格板的特征线.显微镜利用调制发光二极管作为光源,有两个光学成像通道.一个是由双狭缝构成精密测量线条位置.另一个用摄像机直接目视观察.用锁相放大器解调狭缝后的光电二极管电信号.实验表明,网格板线条交点定位检测的重复性标准差约为1 nm.用新开发的一种算法求出了工作台的误差分布图.
In order to make engineering nanotechnology a practical discipline, we need a machine that can locate and manufacture on the subatomic level.I have studied the details of its structure, motor distribution principle, interference technology, etc. When using grid plate machine Self-calibration, an optical microscope was designed to detect the characteristic line of the grid plate.The microscope uses a modulated light-emitting diode as a light source and has two optical imaging channels, one consisting of double slits for the precise measurement of the line position and the other using a camera Direct visual observation.The phase locked amplifier was used to demodulate the slit photodiode signal.Experimental results show that the repeatability standard deviation of grid plate locating point detection is about 1 nm.A new algorithm was developed Workbench error distribution.