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根据端窗透射Micro-CT靶材的理论模型设计了W-Al透射靶材的基本结构,结合Geant4计算模拟软件和Müller的靶温升计算模型分别确定了W靶面和Al基体的厚度.以YXLON光机的W-Al透射靶材结构参数为依据,采用磁控溅射法在Al基体表面分别制备了厚度为2,5和8 mm的W薄膜,并借助SEM进行微观形貌分析,得到了致密度和均匀度均较好的W薄膜靶面.借助YXLON的X射线管,对3种不同厚度靶材的X射线出射率及其对应所需功率进行了实验研究,结果表明:W靶面的最佳厚度是5 mm,此时,靶材的X射线出射率最大且产生X射线所需的功率最小.在此基础上,进行了X射线出射率和X射线成像效果的对比实验,结果表明:无论在X射线出射率及其所需功率方面,还是在X射线成像效果方面,W靶面厚度为5 mm的W-Al透射靶材的性能均优于YXLON W-Al透射靶材,能够满足Micro-CT所需的高质量靶材的应用要求.
The basic structure of the W-Al transmission target was designed according to the theoretical model of the micro-CT target transmitted through the end window. The thickness of the W target and the Al matrix were determined respectively by combining Geant4 calculation software and Müller target temperature rise calculation model YXLON light machine W-Al transmission target based on the structure parameters, the use of magnetron sputtering on the Al substrate surface were prepared W film thickness of 2, 5 and 8 mm, and with SEM microscopic morphology analysis obtained The density and uniformity of the W film target surface with good YXLON X-ray tube on the three different thickness of the target X-ray emission and the corresponding power required for the experimental study results show that: W target The optimal thickness of the surface is 5 mm, at this time, the X-ray output of the target is the maximum and the power required to generate X-ray is minimum.On the basis of this, the comparative experiments of X-ray emission and X-ray imaging are carried out, The results show that the performance of W-Al transmission targets with W target thickness of 5 mm is superior to that of YXLON W-Al transmission targets both in terms of X-ray emission rate and its required power, or in terms of X-ray imaging effect , To meet the Micro-CT required high-quality target application requirements.