本文对在高速钢及硬质合金刀具上溅射沉积碳化钛工艺进行了实验研究，并通过优选，取得了一些 最佳工艺参数，对碳素工具钢和合金钢溅射工艺作了初步探索，对碳化钛涂层的纯度、硬度特别是结合 力和切削性能进行了测定，取得了结合力不低于气相沉积碳化钛和切削寿命提高一倍到几拾倍的良好成 果；还对影响结合力和溅射率的因素进行了分析讨论，找出提高结合力和溅射率的一些途径。 Ｉ In this paper, the high-speed steel and carbide cutting tool for sputtering deposition of titanium carbide process were studied, and through the selection of the best to obtain some of the best parameters of carbon tool steel and alloy steel sputtering process preliminary exploration, The purity and hardness of the titanium carbide coating, especially the bonding and cutting performance were measured, and the good results were obtained that the bonding strength was not less than one-fold to several times as high as that of the titanium carbide vapor-deposited coating and the cutting life; And sputtering factors were analyzed and discussed to find ways to improve the bonding strength and sputtering rate. I