随着科学技术的发展,作为科研的重要工具——理化分析技术,近年来也有很大的发展,特别是一些新仪器的出现,对科研技术工作起了有力的配合和促进作用。电子器件的生产和发展,要求对其材料和工艺进行精细的理化分析,要求对被加工材料的微量和超微量杂质的存在及分布情况,微区域内的成分、结构状态和缺陷分布,材料表面或其上极薄层的成 With the development of science and technology, as an important tool of scientific research - physicochemical analysis technology, great progress has been made in recent years. In particular, the emergence of new instruments has played a powerful role in coordinating and promoting scientific research and technology work. The production and development of electronic devices requires the careful physical and chemical analysis of their materials and processes, the requirements for the existence and distribution of the trace and ultra-trace impurities in the processed materials, the composition of the micro-regions, the distribution of structural states and defects, the surface of the materials Or its very thin layer into