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本文讨论在柔性基材PET上沉积氮化钛(TiN)阳光控制膜——作为隔热薄膜。“隔热”是指对红外光区的有效阻隔。氮化钛(TiN)薄膜具有光谱选择透过性,因此可以作为阳光控制薄膜使用。实验采用中频孪生靶磁控溅射实验装置,在等离子体辐射监视系统(PEM)的控制下,在大面积PET柔性基材上沉积TiN隔热薄膜。实验主要研究了制备不同透光率的PET基TiN隔热膜并观察薄膜表面状况;对沉积的TiN薄膜用分光光度仪进行光谱透过率分析并计算各种透过率薄膜的光学性能参数,比较不同透过率的隔热效果;为了对该隔热薄膜的化学稳定性进行分析,还做了耐酸碱性测试。通过本实验为以后的大规模工业产业化发展奠定良好的基础。
This article discusses the deposition of titanium nitride (TiN) solar control film on a flexible substrate, PET, as a thermal barrier film. “Insulation ” means an effective barrier to infrared light. Titanium nitride (TiN) films are spectrally selective and therefore can be used as solar control films. The experiments were carried out on a large-area PET flexible substrate with TiN thermal insulation film under the control of a plasma radiation monitoring system (PEM) using a mid-frequency twin target magnetron sputtering device. The experiments mainly studied the preparation of PET-based TiN heat-insulating film with different light transmittance and observed the surface condition of the film. The spectral transmittance of the deposited TiN film was measured by spectrophotometer and the optical performance parameters of various transmittance films were calculated. In order to analyze the chemical stability of the insulating film, acid and alkali resistance test was also done. Through this experiment for the future development of large-scale industrialization and lay a good foundation.