新型抗蚀剂介绍金林生（无锡市化工研究设计院）１．序言在制作集成电路、大规模集成电路等半导体器件时，其细微加工是通过将抗蚀剂作为保护膜来进行蚀剂（微图复印术）的。这里所谓抗蚀剂就是经过光和放射线的照射，其溶解性发生变化的涂膜材料，在硅晶基板进行蚀刻的时... Introduction of a new anti-Jin Lin Jin (Wuxi Chemical Research and Design Institute) 1. INTRODUCTION In the fabrication of semiconductor devices such as integrated circuits and large-scale integrated circuits, the microfabrication is performed by etching (micrograph) using a resist as a protective film. Here, the resist is a coating material that changes its solubility after irradiation with light and radiation, and when the silicon substrate is etched,