论文部分内容阅读
静电平行板驱动器是基于静电驱动的MEMS变形镜的关键部件,其静态及动态性能对MEMS变形镜有重要影响。设计并利用表面硅工艺加工制作了三种基于不同弹性系数的静电平行板驱动器的MEMS变形镜,分别采用解析公式和有限元仿真方法分析了弹性系数对变形镜的三项性能参数即行程、吸合电压和固有频率的影响,并利用白光表面轮廓仪进行实验测试,验证了理论和仿真结果的有效性。实验结果表明三种变形镜中半圆环梁驱动器变形镜具有适中的吸合电压和较大的行程,最适合于自适应光学系统的应用需求。
Electrostatic parallel plate drivers are a key component of electrostatically actuated MEMS deformable mirrors and their static and dynamic performance have important effects on MEMS deformable mirrors. Three kinds of MEMS deformable mirrors were designed and fabricated by using surface silicon process. The three parameters of the deformable mirrors, namely the stroke, the suction, the suction and the suction, were analyzed by the analytic formula and the finite element method respectively. Voltage and natural frequency, and the white surface profiler was used to test the experiment, which verified the validity of the theoretical and simulation results. The experimental results show that the semi-circular beam actuator deformable mirror in the three deformable mirrors has a moderate pull-in voltage and a large stroke, which is most suitable for the application requirements of an adaptive optical system.