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用多靶磁控溅射技术制备了Au/SiO_2纳米多层薄膜.利用透射电子显微镜以及吸收光谱对Au/SiO_2复合薄膜的微观结构、表面形貌及光学性能进行了表征和测试.研究结果表明:单层Au/SiO_2薄膜中Au沉积时间小于10s时,分散在SiO_2中的Au颗粒随Au的沉积时间的延长而增大;当沉积时间超过10s后,Au颗粒的尺寸几乎不随沉积时间变化,但Au颗粒的形状由网络状结构变为薄膜状结构.[Au(t1)SiO_2(600)]×5多层薄膜在540—560nm波长附近有明显的表面等离子共振吸收峰,且吸收峰的强度随Au的沉积时间增加而增强.基于修正后的Maxwell-Garnett(M-G)有效媒质理论,讨论了金属颗粒的形状对等离子共振吸收峰的峰位和强度的影响.模拟的吸收光谱与实验吸收光谱形状、趋势及吸收峰位相符合.
The multi-target magnetron sputtering technique was used to fabricate Au / SiO_2 multilayered films. The microstructure, surface morphology and optical properties of Au / SiO_2 composite films were characterized by transmission electron microscopy and absorption spectroscopy. The results show that : When Au deposition time is less than 10s in monolayer Au / SiO_2 film, the Au particles dispersed in SiO_2 increase with the deposition time of Au. When the deposition time exceeds 10s, the size of Au particles almost does not change with the deposition time, However, the shape of Au particles changed from network-like structure to film-like structure. [Au (t1) SiO_2 (600)] × 5 multilayer thin films have obvious surface plasmon resonance absorption near 540-560nm and the intensity of absorption peak Which is enhanced with the deposition time of Au.According to the modified Maxwell-Garnett (MG) effective medium theory, the influence of the shape of the metal particles on the peak positions and intensities of the plasmon resonance absorption peaks is discussed.The simulated absorption spectra and the experimental absorption spectra Shape, trend and absorption peak position is consistent.