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采用双线型三相埋沟结构,设计并研制成功4096位线阵CCPD摄像器件。器件动态范围达600:1,暗电流密度为10nA/cm ̄2。文章阐述了该器件的工作原理、结构设计和制作工艺。
Using double-line three-phase buried structure, design and development of 4096 lines of CCPD camera device. Device dynamic range of 600: 1, dark current density of 10nA / cm ~ 2. The article describes the working principle of the device, structure design and manufacturing process.