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详细比较了氮化铝的各种金属化工艺。分别研究化学镀镍与激光诱导淀积实现金属化的方法。测量表明,两种方法制备的金属层与氮化铝的粘附力均大于10MPa。同时对这两钟方法的特点与适用范围进行概述。
A detailed comparison of various aluminum nitride metalization process. The methods of electroless nickel plating and laser induced deposition for metallization were studied respectively. The measurement shows that the adhesion between the metal layers prepared by the two methods and the aluminum nitride is greater than 10 MPa. At the same time, the characteristics and scope of these two methods are summarized.