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介绍了一种利用激光选择聚焦的结构来增强光电探测器的光电响应的方法。通过采用工作在传输模式的振幅型菲涅耳波带片,获得了较高的激光收集效率,同时也较好地抑制了背景光。当激光入射时,集成了菲涅耳波带片的InGaAs/InP p-i-n光电探测器和InGaAs/InP雪崩光电二极管的响应分别增强了36倍和4倍,而当模拟自然光的卤钨灯照射时,集成了菲涅耳波带片的两类光电探测器的响应均被抑制了30%。集成了菲涅耳波带片的探测器显现出对激光信号的较强吸收,对模拟自然光的卤钨灯光源的明显抑制。
A method of using the structure of laser selective focusing to enhance the photoelectric response of the photodetector is introduced. By using an amplitude-type Fresnel zone plate operating in transmission mode, higher laser collection efficiency is obtained, and the background light is also better suppressed. The response of InGaAs / InP pin photodetectors and InGaAs / InP avalanche photodiodes with integrated Fresnel zone plates increased by 36 times and 4 times, respectively, when the laser was incident. When the natural tungsten light was simulated, The response of both types of photodetectors integrated with Fresnel zones was suppressed by 30%. Detectors incorporating a Fresnel zone plate show a strong absorption of the laser signal, with a significant suppression of the halogen light source simulating natural light.