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为了提高金刚石膜的红外透过率和高温抗氧化性能,采用纯钇(Y)金属靶,使用直流反应磁控溅射法在光学级金刚石自支撑膜表面制备了Y2O3薄膜。对比研究了光学级金刚石自支撑膜和Y2O3/Diamond/Y2O3复合窗口的高温抗氧化性能,及氧化前后样品表面形貌和红外透过率的变化情况。热分析、扫描电子显微镜和傅立叶变换红外光谱仪的研究结果表明Y2O3薄膜对光学级金刚石膜有非常好的抗氧化防护性能,在高达950℃的温度暴露30s后对光学级金刚石膜表面没有造成明显损伤,且仍能保持良好的增透效果(透过率超过80%)。
In order to improve the infrared transmittance and high temperature oxidation resistance of diamond films, pure yttrium (Y) metal targets were used to prepare Y2O3 thin films on the surface of optical diamond self-supporting films by DC reactive magnetron sputtering. The high temperature oxidation resistance of optical diamond self-supporting films and Y2O3 / Diamond / Y2O3 composite windows was compared and the changes of surface morphology and infrared transmittance before and after oxidation were analyzed. The results of thermal analysis, scanning electron microscopy and Fourier transform infrared spectroscopy show that the Y2O3 thin film has a very good anti-oxidation protection on the optical diamond films and no significant damage to the surface of the optical diamond films after exposure to 950 ° C. for 30 s , And still maintain a good antireflection effect (transmittance of more than 80%).