使用磁控溅射方法制备了一系列Tb-Co2FeAl磁性薄膜,研究了两种不同溅射功率以及不同的薄膜厚度对样品的磁性的影响。采用交变梯度磁强计(AGM)对样品磁性能进行表征。结果显示,当Tb靶和Co2FeAl靶的溅射功率分别为5和15 W时,同时表现出平面内各向异性及弱垂直各向异性;而当功率分别为10和30 W时则表现出强垂直磁各向异性,垂直矫顽力Hc=3.3×104A.m-1,且垂直矫顽力的值随着薄膜厚度降低也逐渐减小,当厚度减小到10 nm时,Hc=1×104A.m-1。 A series of Tb-Co2FeAl magnetic films were prepared by magnetron sputtering. The effects of two different sputtering powers and different film thicknesses on the magnetic properties of the samples were investigated. The magnetic properties of samples were characterized using an alternating gradient magnetometer (AGM). The results show that both the in-plane anisotropy and the weak perpendicular anisotropy are exhibited when the sputtering powers of Tb and Co2FeAl targets are 5 and 15 W, respectively, while they show strong at 10 and 30 W Vertical magnetic anisotropy, vertical coercivity Hc = 3.3 × 104A.m-1, and the value of the vertical coercivity decreases with the film thickness decreases, when the thickness decreases to 10 nm, Hc = 1 × 104A.m-1.