论文部分内容阅读
光电位置敏感器件（ＰＳＤ）是一种可直接对其光敏面上的光斑位置进行检测的光电器件，可构成非接触高精度动态测量系统。光电位置敏感器件在使用中的关键问题是如何定量确定入射光强的大小和克服各种背景光干扰，以提高检测的精度和可靠性。根据光电位置敏感器件的原理和光点位置方程，找到有背景光作用于光电位置敏感器件上位置输出的关系及背景光导致的位置误差的实验数据，同时研究入射光强对光电位置敏感器件位置输出误差最小的定量关系。
Photoelectric position sensitive device (PSD) is a kind of optoelectronic device which can directly detect the position of light spot on the photosensitive surface, and can form a non-contact high-precision dynamic measurement system. Photoelectric position sensitive devices in the use of the key issue is how to quantitatively determine the size of the incident light intensity and overcome a variety of background light interference to improve the detection accuracy and reliability. Based on the principle of photoelectric position sensitive device and the equation of spot position, the experimental data of the relationship between the position output of the position sensitive device with background light and the position error caused by the background light, and the position output of the photoelectric position sensitive device The smallest error quantitative relationship.