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本文以超精密模辊机床为研究载体,将具有代表性的环槽微结构阵列作为研究对象。通过多体系统理论以及齐次坐标变换的方法建立机床的几何误差模型从而得到几何误差对环槽微结构阵列的影响,并用激光干涉仪对几何误差分量进行了测量。在进行数据处理后提出了一种补偿方法使环槽微结构的加工质量得到了改善。
In this paper, the ultra-precision die-roll machine as the carrier, the representative ring groove microstructure array as the research object. Through the multi-body system theory and the homogeneous coordinate transformation method, the geometrical error model of the machine tool is established to obtain the influence of the geometrical error on the annular groove micro-structure array. The geometrical error component is measured by the laser interferometer. After data processing, a compensation method is proposed to improve the processing quality of ring groove microstructure.