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提出了一种高品质因数的氧化硅平面集成光波导谐振腔的设计与加工方案。利用Matlab与BeamPROP软件对回音壁模式(WGM)谐振腔结构模型进行了仿真分析,深入讨论了耦合状态、腔长与谐振腔品质因数的关系。设计了直径6 cm的环形光波导谐振腔,直波导与环形腔的耦合率为3.3%。整个谐振腔耦合结构被设计为欠耦合状态来优化其品质因数。在此基础上,在硅衬底上采用等离子体增强化学气相沉积(PECVD)技术和紫外光刻技术制作出二氧化硅光波导谐振腔芯片,芯片尺寸为7 cm×7 cm。利用一个波长为1 550 nm可调谐激光器对谐振腔的光谱进行了测试,测试结果表明所加工出的氧化硅光波导谐振腔的品质因数高达4.3×107。
A design and processing scheme of a high quality factor silicon oxide planar integrated waveguide cavity are proposed. Using Matlab and BeamPROP software, the structural model of WGM resonant cavity is simulated and analyzed. The relationship between the coupled state, the cavity length and the quality factor of resonator is discussed in depth. A ring waveguide with a diameter of 6 cm was designed. The coupling ratio between the waveguide and the ring cavity was 3.3%. The entire resonator coupling structure is designed to be less coupled to optimize its quality factor. On this basis, a silicon optical waveguide resonator chip was fabricated on a silicon substrate by plasma-enhanced chemical vapor deposition (PECVD) and ultraviolet lithography, with a chip size of 7 cm × 7 cm. The resonant spectrum of the resonator was tested with a wavelength of 1 550 nm tunable laser. The experimental results show that the quality factor of the fabricated silicon oxide waveguide is up to 4.3 × 107.