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一、前言从真空工作范围来讲,以低、中真空比较普及。中真空测量技术在气体放电、等离子体、稀薄气体动力学以及真空冶炼、真空焊接,真空镀膜、空间模拟等方面具有重要的实际意义。目前广泛使用的电离(DL—2)—热偶(DL—3)复合真空计虽已有几十年的历史,但它的缺点却随着低、中真空技术的推广而日益显露。主要是:DL—2电离真空计在5×10~(-4)～1×10~(-3)乇内寿命很短、阴极工作十多小时后,发射能力将急剧下降;而在10~(-2)乇附近的低真空时,往往由于DL—3热偶计的判断失误、导致DL—2电离计进入高压强下工作,使电离计的电极氧化,甚至烧毁灯丝。此外,电离计是玻璃外壳,容易损坏。
First, the preface From the scope of work in the vacuum, with low, more popular vacuum. Medium vacuum measurement technology has important practical significance in gas discharge, plasma, rare gas dynamics and vacuum smelting, vacuum welding, vacuum coating, space simulation and so on. The widely used ionization (DL-2) - thermocouple (DL-3) composite vacuum gauge has decades of history, but its shortcomings with the promotion of low and medium vacuum technology and increasingly revealed. The main is: DL-2 ionization vacuum gauge in the 5 × 10 ~ (-4) ~ 1 × 10 ~ (-3) Torr life is very short, more than 10 hours after the cathode, the firing capability will decline sharply; (-2) Torr near the low vacuum, often due to DL-3 thermometer to determine the error, leading to DL-2 ionization gauge into the work under high pressure, the ionization gauge electrode oxidation, or even burn the filament. In addition, the ionization gauge is a glass case that is easily damaged.