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纳皮型卫星和卫星编队飞行的发展,对星上推进系统提出了更高的要求,基于微机电系统(MEMS)技术的微型推进系统以此为契机迅速发展起来。基于MEMS技术的微推进除了具有成本低、体积小、质量轻等优点之外,还具有很高的集成度。它利用MEMS加工技术,能将推进系统的推进剂、贮箱、喷嘴、阀门、推进剂进给系统,以及某些微传感器和执行器,甚至控制电路都集成在一个或几个硅片上,再通过键合等微连接装配技术将这些MEMS器件组装在一起,形成功能完善、稳定性高的集成微推进系统。目前国内外对集成式微推进的相关研究大部分都处于设计和试验阶段。随着MEMS技术的不断发展和进步,集成式微推进技术将日趋成熟,并最终广泛应用于微小卫星领域。
The development of NAPI satellites and satellite formations has put forward higher requirements on the propulsion system of the satellite, and the micro propulsion system based on micro-electromechanical system (MEMS) technology has taken this opportunity to develop rapidly. In addition to the advantages of low cost, small size, light weight and other advantages, MEMS-based micro-propulsion also has a high level of integration. It utilizes MEMS processing technology to integrate propulsion, tanks, nozzles, valves, propellant feed systems, as well as certain microsensors and actuators, and even control circuitry, into propulsion systems onto one or several wafers and then These MEMS devices are assembled together by micro-assembly techniques such as bonding to form a fully integrated micro propulsion system that is fully functional and highly stable. At present, most of the researches on integrated micro-propulsion at home and abroad are in the design and experimental stage. With the continuous development and progress of MEMS technology, the integrated micro-propulsion technology will become more and more mature and will eventually be widely used in the field of micro-satellites.