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近年来,大口径、大非球面度、快焦比、高次非球面光学元件在天文光学、空间光学和地基空间目标探测与识别等领域得到了越来越广泛的应用。目前对此类光学元件的检测一般采用零位补偿法或消回程误差的非零位检测法。其中消回程误差的非零位补偿法处理过程复杂,缺乏检测直观性,且测量精度无法保证,故在针对一些面形精度要求非常高的镜面时并不适用。以口径为1020mm、焦比为1/0.5、非球面度为1.8mm、高次项达6次的凹高次非球面反射镜检测为研究基础,提出了分阶段设计零位补偿检验光路的新思路,以满足此类镜面在粗抛、精抛、干涉仪检测等不同研制与检验阶段的需求。最终检测面形精度达到了λ/50。
In recent years, large diameter, large asphericity, fast coercivity, and high order aspheric optical elements have become more and more widely used in astronomical optics, space optics and spaceborne target detection and recognition. At present, the detection of such optical components generally use the zero compensation method or cancel the return error non-zero detection. Among them, the compensation of non-zero compensation for backtrack error is complicated, lack of detection intuition, and the measurement accuracy can not be guaranteed. Therefore, it is not suitable for the mirror which requires very high surface accuracy. Based on the detection of concave high-order aspheric mirrors with a diameter of 1020mm, a coke ratio of 1 / 0.5, an asphericity of 1.8mm and a high-order term of 6, a novel design of zero-offset optical inspection was proposed Train of thought to meet such a mirror in rough throwing, precision polishing, interferometer testing and other different stages of development and testing needs. Final detection surface accuracy reached λ / 50.