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本发明涉及一种降低影像传感器小丘的方法,包括淀积粘合层、铝遮蔽、破真空和淀积抗反射层,粘合层为一层厚度为20~100的金属钛层,且金属钛层上淀积有一层厚度为200~300的氮化钛层,铝遮蔽的厚度为1000~3000,抗反射层厚度为300~600。在铝淀积完成后进行破真空处理,即离开腔体依靠空气缓慢冷却,释放应力,为尽可能的减少对产能的影响,破真空的时间控制在20~30min。本发明优化了铝遮蔽传统工艺,在铝淀积后采用破真空的方法来缓解铝薄膜的应力,解决小丘现象,本发明对比起传统铝遮蔽工艺,减少了小丘,降低了串扰,提高了传感器的质量。。A。A。A。A
The present invention relates to a method of reducing the hillock of an image sensor comprising depositing an adhesive layer, aluminum shading, breaking vacuum and depositing an antireflection layer, the adhesive layer being a layer of titanium metal having a thickness of 20-100 and the metal A titanium nitride layer with a thickness of 200-300 is deposited on the titanium layer, the thickness of the aluminum shielding layer is 1000-3000, and the thickness of the anti-reflection layer is 300-600. After the aluminum deposition is completed, vacuum treatment is performed, that is, leaving the cavity to cool slowly by the air to release the stress, so as to reduce the impact on the production capacity as much as possible. The time of breaking the vacuum is controlled at 20-30 minutes. The invention optimizes the traditional aluminum shading process, adopts a vacuum breaking method to relieve the stress of the aluminum thin film after the aluminum is deposited, and solves the hillock phenomenon. Compared with the traditional aluminum shading process, the invention reduces the hillock, reduces the crosstalk, and improves The quality of the sensor. . A. A. A. A