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纳米技术是一种在0.1-100nm尺度上研究原子、分子现象及其结构信息的技术。纳米技术的主要作用体现在两个方面:①促进器件小型化,使低成本、高集成度的微器件、微传感器、微型仪器成为可能;②物质在纳米尺度上表现出纳米效应,包括量子效应、较强的表面、界面效应等,会使得物质具有很多新特性,从而能够制造出新的具有特定功能的装置。纳米技术的最终目标是操纵单个原子和分子,并在纳米尺度上设计制备表面结构,进而制造出具有特定功能的产品,实现生产方式的飞跃。主要综述当前几种主要纳米光刻加工技术的类型、工艺、特点,及其在表面纳米结构加工中的应用。
Nanotechnology is a technique that studies atomic, molecular phenomena and structural information at 0.1-100 nm scale. The main role of nanotechnology is reflected in two aspects: ① to promote the miniaturization of the device, so that low-cost, highly integrated micro-devices, micro-sensors, micro-instruments possible; ② nano-scale material exhibits nanometer effects, including quantum effects , Strong surface, interface effect, etc., will make the material has many new features, which can create a new device with a specific function. The ultimate goal of nanotechnology is to manipulate individual atoms and molecules and to design and fabricate surface structures on the nanoscale to create products with specific functions that make a quantum leap in production. This paper mainly reviews the types, process and characteristics of several main nano-lithography processing technologies and their applications in the processing of surface nanostructures.