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采用毛细管微模塑技术和转移微模塑技术,以硅片为栽片,以图案化聚二甲基硅氧烷(PDMS)弹性体为模板,以聚碳硅烷(PCS)和聚硅氮烷(PSZ)为先驱体,经过先驱体的渗入、先驱体的交联固化、弹性模板的去除以及图案化先驱体的无机化,制备了图案化SiC和SiCN陶瓷微结构.研究结果表明,所制备的陶瓷微结构的尺寸和形状受模板的图案化尺寸和形状控制.由于SiC和SiCN非氧化物陶瓷自身的优良性能将使得所制备的图案化SiC和SiCN陶瓷微结构在高温、高压等环境下具有非常广泛的应用前景.
Using capillary micro-molding technology and transfer micro-molding technology, using silicon as a planting sheet, patterned polydimethylsiloxane (PDMS) elastomer as a template, polycarbosilane (PCS) and polysilazane (PSZ) as precursors, patterned SiC and SiCN ceramic microstructures were prepared by infiltration of precursors, cross-linking and curing of precursors, removal of elastic template and inorganicization of patterned precursors.The results show that the prepared Of the size and shape of the ceramic microstructure controlled by the patterned size and shape of the template.Since the excellent properties of SiC and SiCN non-oxide ceramics will make the prepared patterned SiC and SiCN ceramic microstructures in high temperature, high pressure and other environments Has a very wide range of applications.