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径向热导率是金刚石膜应用中的一项主要技术指标。本文介绍了一种通过热导率和X衍射晶面图间相关性估算直流电弧等离子体喷射化学气相沉积金刚石膜径向热导率的方法。该方法需满足的条件为 (111)为主的三向系中 (2 2 0 )和 (311)的CPS值分别是 2 3～ 33%和 8～ 15% ,或者是在四取向膜中要求 (4 0 0 )的CPS值低于 5%。估算值的最大偏差为 9.5%和 3.5%。当 (2 2 0 )的CPS值高时或 (311)的CPS值低时 ,估算值比测量值高 ,反之亦然。
Radial thermal conductivity is a major technical indicator of diamond film applications. In this paper, a method to estimate the radial thermal conductivity of diamond film deposited by direct current arc plasma jet CVD by using the correlation between thermal conductivity and X-ray crystallographic plane is introduced. The CPS values of (220) and (311) in the three-way system dominated by this method are 23 to 33% and 8 to 15%, respectively, or are required in the tetra-oriented film (400) has a CPS value of less than 5%. Estimates of the maximum deviation of 9.5% and 3.5%. When the CPS value of (2 2 0) is high or the CPS value of (311) is low, the estimate is higher than the measured value and vice versa.