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诺发系统有限公司近日推出了SOLA业界首套针对先进介电薄膜的淀积后处理的紫外热处理(UVTP)系统。SOLA为300mm晶圆的大批量生产而设计,可以满足下一代消费电子产品必需的新材料和制造技术的需求。SOLA是实现许多先进薄膜应用的关键设备,其中包括晶体管水平高应力氮化硅薄膜(HSN
Novo Systems Co., Ltd. recently introduced SOLA’s first ultraviolet heat treatment (UVTP) system for post-deposition deposition of advanced dielectric films. Designed for high-volume production of 300mm wafers, SOLA meets the needs of new materials and manufacturing technologies necessary for the next generation of consumer electronics products. SOLA is a key enabler for many advanced thin film applications, including transistor-level, high-stress silicon nitride film (HSN