论文部分内容阅读
集群组合设备将大有发展为了反映半导体工艺集成的发展，最近对１９９５～２０００年市场研究预测：柔性集群组合设备（ｆｌｅｘｉｂｌｅｃｌｕｓｔｅｒｔｏｏｌｓ）将增长四倍，即从３．５９亿美元增至１４．４亿美元。柔性集群组合设备设计方案满足美国半导体设备及材料...
Cluster equipment will be greatly developed in order to reflect the development of integrated semiconductor technology, the recent market research from 1995 to 2000 predicted: Flexible cluster equipment (flexibleclustertools) will quadruple, from 359 million US dollars to 1.44 billion Dollars. Flexible cluster combination device design solutions to meet the US semiconductor equipment and materials ...