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本文描述了一个利用数字信号增强技术来处理反射电子信号的电子束定位系统。用数字信号增强技术可以得到足以精确定位的信号噪声比。实验结果表明,带有这种定位系统的电子束曝光装置,能够得到0.1μm(2σ)的图形定位精度。
This article describes an electron beam positioning system that uses digital signal enhancement techniques to process reflected electron signals. Signal-to-noise ratio accurate enough to locate with digital signal enhancement techniques. Experimental results show that the electron beam exposure apparatus with such a positioning system can obtain the pattern positioning accuracy of 0.1 μm (2σ).