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本文介绍ZnO/玻璃层状结构器件的刻蚀,Al膜和ZnO膜腐蚀溶液的选择,以及腐蚀时腐蚀液浓度,温度和时间对器件的影响.
This article describes the etching of ZnO / glass lamellar structures, the selection of etching solutions for Al and ZnO films, and the effect of etching solution concentration, temperature and time on the device.