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本文介绍了一种基于反射型原理的光纤非接触式位移测最仪。该测量仪可广泛用于尺寸、形状、位置精度的离线和在线测量,特别适于精密和超精密加工中应用。
This paper introduces a non-contact displacement measuring instrument based on reflective principle. The gauge can be widely used offline, on-line measurement of size, shape, position accuracy, especially for precision and ultra-precision machining applications.