利用脉冲激光沉积装置在钼筒上沉积镧氧膜,通过俄歇能谱仪确定其表面成分并进行定量分析,结合离子刻蚀对薄膜进行剖面分析,实验结果表明,除去薄膜表面少许C,O吸附外,本制备方法污染小,定量分析证明薄膜为富镧的镧氧薄膜。 The lanthanum oxygen film was deposited on the molybdenum can by pulsed laser deposition apparatus, the surface composition was determined by Auger spectrometer and quantitative analysis was carried out. The cross-section of the film was analyzed by ion etching. The experimental results showed that removing a little C, O Adsorption, the preparation method of pollution is small, quantitative analysis shows that the film is lanthanum-rich lanthanum oxygen film.