论文部分内容阅读
引言由碳-氢系统形成的多种多样的材料,如金刚石、石墨直至高聚合的碳氢化合物,其中,人们知之不多的是非晶态类金刚石覆层(ADLC)。这种覆层除碳外,还包含有相当份量的氢。所谓“类金刚石”则表示,ADLC覆层的许多性质,如高硬度、电绝缘性、好的导热性和低的摩擦系数等与晶态的金刚石很相似。表1列出了ADLC覆层的一些最重要的性质。ADLC覆层不仅有这么多优良的性质,而且还可能在较低的温度下沉积出,这就吸引人们将这种技术工业化,以用于磨损防护。
INTRODUCTION A wide variety of materials formed from carbon-hydrogen systems, such as diamond and graphite up to highly polymerized hydrocarbons, of which amorphous diamond-like carbon coatings (ADLC) are poorly understood. This coating in addition to carbon, but also contains a considerable amount of hydrogen. The so-called “diamond” indicates that many of the properties of ADLC coating such as high hardness, electrical insulation, good thermal conductivity and low coefficient of friction and crystalline diamond is very similar. Table 1 lists some of the most important properties of ADLC coatings. ADLC coating not only has so many excellent properties, but also may be deposited at a lower temperature, which attracted people to industrialize this technology for wear protection.