For some repeatedly occurring failure with root cause, the reliability centered maintenance (RCM) cant deal with them effectively. So, the logic diagram of RCM was improved by combining it with proactive maintenance technology. First, root cause analysis is used to build a key result-cause chain of the repeatedly occur failure. Then, a reasonable link in the chain, which work station is suitable to be monitored and repaired, should be selected. Finally, the corresponding proactive maintenance measure should be adopted to prevent the matter occur on the chain and broken the key result-cause chain, and the repeatedly occur failure is to be prevent at a deeper level or from the root cause. By doing this, a system engineering method comes into being, not only it can determine the needs of preventive maintenance for equipment, but also determine the proactive maintenance needs for equipment. The analysis result of reliability centered maintenance and the analysis result considering proactive maintenance are combined to form a maintenance guideline containing proactive maintenance strategy.