近几年来,乳胶扩散逐步为人们所重视。由于它具有一系列优点而日益广泛地被应用于半导体器件生产工艺中。本文着重叙述在功率晶体管的发射区扩散中使用掺磷乳胶源的实验方法和所得到的结果,并与液态源扩散的结果作了比较,以便为进一步开展这方面的研究工作打下基础。 In recent years, the spread of latex gradually people pay attention. Due to its range of advantages, it is increasingly used in semiconductor device manufacturing processes. This article focuses on the experimental methods and results obtained using phosphorus-doped latex sources in the diffusion of the emitter region of a power transistor. The results are compared with the results obtained from the diffusion of the liquid source to lay the foundation for further research in this area.