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以六甲基二硅胺烷作原料，用CVD法合成的纳米粉体，在1000～1500℃温度范围内合成的均属无定形，1000℃合成的纳米颗粒呈圆球形，粒径8～10nm，少量25～30nm．在1400℃高温下合成的颗粒较均匀，为8～10nm的圆球形．经高温晶化处理后，低温时合成的粉末呈晶须状，SiC和Si3N4相共存，以SiC相为主．较高温度下合成的粉体颗粒长大成20～40nm，以β-SiC相为主伴有α-SiC相，颗粒外表面有1～2nm的非晶层包裹，当在大气中存放三个月以后，则观测到原来品化的结构变成了无定形．
Nano-powders synthesized by CVD method using hexamethyldisilazane as raw materials are synthesized in the temperature range of 1000-1500 ℃, which are all amorphous. The synthesized nano-particles at 1000 ℃ have a spherical shape with particle size of 8-10 nm , A small amount of 25 ~ 30nm. At 1400 ℃ high temperature synthesis of particles more uniform, 8 ~ 10nm spherical. After high-temperature crystallization treatment, the synthesized powder was whisker-like at low temperature, and SiC and Si3N4 coexisted, taking SiC as the main phase. The particles synthesized at a higher temperature grow up to 20-40 nm. The α-SiC phase is dominated by the β-SiC phase. The outer surface of the particles is surrounded by a 1-2 nm amorphous layer. When stored in the air for three months Later, it was observed that the original structure became amorphous.