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本文介绍了对离子溅射磁控管装置中磁场强度和工作气体坛强对伏安特性和起辉电压影响的实验研究。分析了阳极放电层内发生的过程,并在此基础上得到与实验结果相当接近的解析表达式。 低温等离子体新的很有前途的应用之一是通过离子溅射各种材料的靶板制取薄膜,直到目前为止,这
This paper introduces the experimental study of the influence of the magnetic field intensity and the working strength of the working gas on the volt-ampere characteristics and the starting voltage in an ion sputtering magnetron device. The process of the anode discharge layer was analyzed, and on the basis of this, the analytic expression was obtained which was close to the experimental result. One of the most promising new applications for low-temperature plasma is the production of thin films by ion sputtering target plates of various materials, up until now