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针对传统微透镜阵列制作工艺复杂、成本高、周期长等缺点,研究了一种低成本、高效率制作微透镜阵列的技术方法。以SU-8负性光刻胶为主模结构材料,采用2次紫外斜曝光工艺,加工出主光轴平行于硅基的微透镜阵列作为主模结构。依次采用聚二甲基硅氧烷(PDMS)软光刻技术和NOA73紫外曝光技术对主模结构进行复制得到PDMS和NOA73 2种材料的微透镜阵列,用共聚焦显微镜观察微透镜阵列的表面形貌并搭建光学检测平台,测试微透镜阵列的成像效果。结果显示,NOA73材料的微透镜阵列具有更好的光学性能。通过上述工艺加工的微透镜阵列具有较好的成像效果和表面形貌,重复性好且加工周期短,可集成在微流式细胞仪中用于样本流的荧光检测,提高了检测精度。
Aiming at the shortcomings of traditional microlens arrays, such as complicated fabrication process, high cost and long period, a method of low cost and high efficiency fabrication of microlens arrays has been studied. SU-8 negative photoresist as the main structure of the material, the use of two times UV oblique exposure process, processing the main optical axis parallel to the silicon-based microlens array as the main mode structure. Followed by the use of PDMS soft lithography and NOA73 UV exposure technology to replicate the master structure to obtain PDMS and NOA73 two kinds of material microlens array, with a confocal microscope to observe the surface of the microlens array Appearance and build optical detection platform to test the imaging effect of microlens array. The results show that the microlens array of NOA73 material has better optical properties. The microlens array processed by the above process has good imaging effect and surface topography, good repeatability and short processing period, and can be integrated in a microfluidic cytometer for fluorescence detection of a sample flow, thereby improving the detection precision.