【摘 要】
：
设计并制备了一种基于玻璃-硅微纳米结构的重金属检测微纳传感器芯片用于检测铅.传感器芯片集成了Ag/AgCl参比电极、三维金微阵列工作电极、金对电极以及微检测腔.该传感器采
【机 构】
：
宁波大学信息科学与工程学院,浙江宁波315211;宁波大学信息科学与工程学院,浙江宁波315211;中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海200050
论文部分内容阅读
设计并制备了一种基于玻璃-硅微纳米结构的重金属检测微纳传感器芯片用于检测铅.传感器芯片集成了Ag/AgCl参比电极、三维金微阵列工作电极、金对电极以及微检测腔.该传感器采用微电子机械系统(MEMS)批量制备工艺,一批次同时制备多片4英寸(1英寸=2.54 cm)晶圆,而每片晶圆上有20个芯片.在优化的实验条件下,即最优沉积电压为-1V和最优沉积时间为240 s时,用方波溶出伏安法检测铅离子,信噪比为3时检测限达到0.82 μg·L-1.用同一批次制备的传感器,多次测量80 μg·L-1的铅离子,其重复性偏差为2.21％～3.35％,表明该新型微纳传感器具有良好的灵敏度和一致性,为水环境监测中大量布设重金属检测传感器节点提供了技术方案.
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