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利用Cu离子交换技术制备了BK7玻璃平面光波导,在6328nm波长下,用棱镜耦合技术测量出所制备波导的有效折射率,利用反WKB方法计算并确定了平面光波导的折射率分布,通过对折射率分布进行函数拟合,发现离子交换后的样品折射率分布近似符合改进后的高斯分布,样品的折射率分布似乎是一个掩埋波导的折射率分布,求出所制备玻璃平面光波导在570℃的扩散系数De≈12133×10-14m2s。同时,对所制备波导进行了电子显微镜(EMS)和次级离子质谱(SIMS)测试,得到了铜离子在玻璃表面的浓度分布,从而证明了实验所得到的BK7玻璃平面光波导是掩埋波导。这种掩埋平面波导是由单步Cu离子交换技术得到的。
The BK7 glass planar optical waveguide was prepared by Cu ion exchange technology. The effective refractive index of the prepared waveguide was measured by the prism coupling technique at the wavelength of 6328 nm. The refractive index distribution of the planar optical waveguide was calculated and determined by the inverse WKB method. It is found that the refractive index distribution of the sample after ion-exchange approximates to the improved Gaussian distribution. The refractive index distribution of the sample appears to be the refractive index distribution of a buried waveguide, and the glass-plane optical waveguides prepared at 570 ℃ The diffusion coefficient De ≈ 12133 × 10-14m2s. At the same time, the prepared waveguide was tested by electron microscopy (EMS) and secondary ion mass spectrometry (SIMS), and the concentration distribution of copper ion on the glass surface was obtained. It was proved that the BK7 glass planar waveguide was a buried waveguide. This buried planar waveguide is obtained by a one-step Cu ion exchange technique.