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本文分别介绍了周永久磁体和电磁体所做的关于磁场强度及其分布对平面磁控管工作特性影响的研究情况。采用的电磁铁可在环状磁力线路径的中心之处产生0～30mT的变化磁场,在磁场增至25mT(250高斯)时,磁控管工作特性曲线有明显改善;如果超过25m T,则工作特性曲线变化不大。用永久磁体系统研究了由磁极产生的磁场形状及其对工作参数(特别是靶的利用率和膜的纯度)的影响。研究表明,平行于靶表面的磁场,可以在低压强下将溅射出来的材料的高能量传输到基片上,从而对靶有效瞄准、均匀刻蚀。文中还介绍了用市场上买到的不同磁体来设计永久磁体的方法。
In this paper, we introduce the research on the influence of the magnetic field strength and its distribution on the operating characteristics of planar magnetron by Zhou Yongjiu and Li Jie respectively. The adopted electromagnet can generate a changing magnetic field of 0-30mT at the center of the annular magnetic field line path. When the magnetic field increases to 25mT (250 gauss), the working characteristic curve of the magnetron is obviously improved; if it exceeds 25mT, the working The characteristic curve has not changed much. The permanent magnet system was used to study the shape of the magnetic field generated by the pole and its effect on operating parameters, especially the utilization of the target and the purity of the membrane. Studies have shown that a magnetic field parallel to the target surface can transfer the high energy of the sputtered material to the substrate at low pressure, effectively aiming and uniformly etching the target. The article also describes the use of commercially available different magnets to design permanent magnets.