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讨论了在单晶锗上为获得单波段（３～５μｍ）及双波段（３～５μｍ、８～１２μｍ）兼容ａ－Ｃ：Ｈ增透膜所必需的膜系设计，及用椭偏法对该膜进行的增透结果分析。结果表明，ａ－Ｃ：Ｈ膜是理想的红外增透膜。椭偏法对分析所制备的膜是否符合膜系设计要求及沉积工艺参数的确定具有重要意义。
In this paper, the design of the membrane system for single-band (3-5 μm) and dual-band (3-5 μm, 8-12 μm) compatible a-C: The membrane was analyzed for antireflection results. The results show that a-C: H film is the ideal infrared antireflection coating. Ellipsometry analysis of the prepared film meets the membrane design requirements and deposition process parameters is of great significance.