论文部分内容阅读
本文对金刚石薄膜的性能、应用，金刚石薄膜的合成方法以及薄膜样品的表征等作了较详细的介绍。并根据金刚石薄膜研究的现状提出应进一步探讨的几个问题。
In this paper, the properties and applications of diamond films, the synthesis methods of diamond films and the characterization of thin films are introduced in detail. According to the status quo of diamond film research, several problems should be further explored.