GZ413型2×512电荷耦合模拟延迟线系电子部44所85年6月鉴定的科研成果项目之一。该产品采用三相时钟驱动,表面N沟硅栅结构。在工艺上采用双面吸杂,SiO_2抛光,掺杂氧化及氮氢等退火工艺。该产品具有体积小,重量轻,功耗低,产品性能稳定可靠。它主要用于模拟延迟线,模拟存贮,频率与时间压缩与扩展等方面。在航空电子学领域,声纳系统,雷达系统及各种通信系统中有着广阔的应用前景。 GZ413 type 2 × 512 charge-coupled analog delay line Department of Electronics 44 in June 85 identified as one of the scientific research projects. The product uses three-phase clock-driven, surface N-groove silicon gate structure. In the process using double-sided gettering, SiO 2 polishing, doping oxidation and nitrogen and hydrogen annealing process. The product has a small size, light weight, low power consumption, product performance is stable and reliable. It is mainly used for analog delay line, analog storage, frequency and time compression and expansion and so on. In the field of avionics, sonar systems, radar systems and various communication systems have broad application prospects.