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近几年来,国内一些单位,为了提高真空器件的质量,对管内残余气体进行了质谱分析。所用的方法是预先把质谱计管封接在显象管的锥体上,随整管一起排气、烘烤封离等。我们称这种方法为“预制样管法”。而“开管法”可对任何需要分析的管子(寿命过程中、使用过程中等)进行分析。工艺过程是:在管子锥体上先开一个不穿透的小窗,不使锥体玻璃漏气,再于小窗孔之上用环氧树脂粘接有质谱计管和规管的玻璃管道,抽至高
In recent years, some domestic units, in order to improve the quality of vacuum devices, the tube of residual gas mass spectrometry. The method used is to seal the spectrometer tube in advance on the cone of the tube, exhaust it with the tube, and seal it off. We call this method “precast tube method.” The “open pipe method” can be any analysis of the tube (life process, the use of process, etc.) for analysis. Process is: first in the pipe cone to open a small window does not penetrate, do not make the cone of glass leaks, and then in the small window with epoxy resin bonded spectrum tube and the regulation of the glass pipe , Pumping to high