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光子晶体慢光波导以其体积小,易于集成等优点,近年来成为国内外研究者用于实现全光缓存器的热点技术。基于SOI晶圆制作了光子晶体波导,并对其进行了数值仿真和实验测试。计算了波导的能带和群折射率与波长的关系曲线。通过相位延迟和时间延迟方法对波导群折射率进行了测量。相位延迟方法得到的群折射率曲线与仿真结果具有相同的趋势。通过时间延迟的方法测量了脉冲延时,大约是4.7 ps,得到的结果与相位延迟计算结果相吻合。
In recent years, photonic crystal slow optical waveguide has become a hot technology for researchers to realize all-optical buffer because of its small size and easy integration. Photonic crystal waveguides were fabricated based on SOI wafers, and their numerical simulations and experimental tests were carried out. The waveguides’ energy band and group refractive index are plotted against the wavelength. Waveguide group refractive index was measured by the method of phase delay and time delay. The group refractive index curve obtained by the phase delay method has the same tendency as the simulation result. The pulse delay is measured by the time delay method, which is about 4.7 ps. The obtained result is in good agreement with the phase delay calculation result.