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本文介绍一种以作者提出的掠射式镜面莫尔轮廓法的原理为依据而设计的镜面平整度测试仪。文中介绍了基本的光学原理以及能产生很大的放大系数以至在全场可达到微米级精度的条件。解释了仪器的结构及利用此仪器检测不同面形试件时所特有的条纹形状。最后提供由该议器所获得的球镜面及硅片的条纹照片。
This article presents a mirror flatness tester based on the principle of the glancing mirror moiré contour proposed by the author. The article describes the basic optical principles and can produce a large amplification factor as well as the audience can reach micron-precision conditions. Explain the structure of the instrument and use this instrument to detect the different shape of the strip when the strip shape. Lastly, we will provide the stripe photos of the spherical surface and the silicon wafer obtained from this device.