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本文叙述了真空系统中水蒸汽和油污染的来源和防止措施 ,并提出在开机和停机过程中尤其是突然停电时大气和油蒸汽通过抽气管道返回真空室问题的解决方法
This paper describes the source and prevention of water vapor and oil contamination in the vacuum system and proposes a solution to the problem of atmospheric and oil vapor return to the vacuum chamber through the extraction duct during start-up and shut down, especially during a sudden power failure