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结合RF磁控溅射和水热合成法制备ZnO纳米结构薄膜,利用XRD及SEM分析ZnO薄膜的晶体结构和形貌、XPS分析薄膜的化学组分。结果表明,在适当的条件下,所制备的ZnO薄膜为具有良好c轴取向的纳米棒状结构,且ZnO纳米棒薄膜表面吸附的氧原子及晶格的氧空位缺陷增多。利用所制备ZnO纳米棒薄膜的上述特性,将其作为气体敏感材料。分别沉积于128°YX-LiNbO_3和36°YX-LiTaO_3基片,研制多层结构的声表面波(Rayleigh波和Love波)氢气传感器,并进行室温条件下氢气的实时传感检测,结果显示所研制的Love波传感器具有更高的灵敏度,性能更优化。
ZnO nanostructured films were prepared by RF magnetron sputtering and hydrothermal synthesis. The crystal structure and morphology of ZnO films were analyzed by XRD and SEM. The chemical composition of the films was analyzed by XPS. The results show that under proper conditions, the prepared ZnO thin films are nanorod-like structures with good c-axis orientation, and oxygen vacancies and lattice oxygen vacancy defects adsorbed on the ZnO nanorod thin films increase. The prepared ZnO nanorod films were used as the gas-sensitive materials due to the above characteristics. Respectively, were deposited on 128 ° YX-LiNbO 3 and 36 ° YX-LiTaO 3 substrates to develop multi-layer structure of the surface acoustic wave (Rayleigh wave and Love wave) hydrogen sensor, and real-time sensing of hydrogen at room temperature sensor test results show that Love wave sensor developed with higher sensitivity, better performance.