精密定位和机电技术近年来,以电子仪器、光学装置以及半导体部件等为中心的高精度化飞速地发展着。与此同时,许多技术,特别是那些在制造技术领域里的精密定位技术发挥了重要的作用。例如,最近的超大规模集成电路制造装置要求0.1微米以上的定位精度,定位技术的水平就成了左右整个装置性能的关键。最近的精密定位技术可以说是机电技术 Precision positioning and electromechanical technology In recent years, electronic instruments, optical devices and semiconductor components as the center of the rapid development of high precision. At the same time, many technologies, especially those in the area of ​​manufacturing technology, play an important role. For example, the recent fabrication of VLSI devices requires positioning accuracies of more than 0.1 micron, and the level of positioning technology has become the key to influencing overall device performance. The latest precision positioning technology can be said that the electromechanical technology