电子探针是1949年由法国R.卡斯坦(Castaing)把一台电子显微镜和X光谱仪组合改装成的。1956年第一台定点式仪器正式制成,1960年扫描型商品仪器问世。70年代初,由于引进了扫描电镜的二次电子图象技术,电子探针进入了一个新的发展阶段,其 The electron probe was converted from a combination of electron microscopy and X-ray spectroscopy in 1949 by Castaing, France. The first fixed-point instrument was officially made in 1956, and the scanning-type commodity instrument was introduced in 1960. The early 70s, due to the introduction of the scanning electron microscopy of secondary electronic imaging technology, electronic probes into a new stage of development, its